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Yokogawa SR1015C02-2SN/97S1121 DD controller: Leading the innovation of precision control technology and enabling a new dimension of high-end manufacturing

Yokogawa SR1015C02-2SN/97S1121 DD controller: Leading the innovation of precision control technology and enabling a new dimension of high-end manufacturing

May 23,2025
In high-end manufacturing fields such as semiconductors, precision electronics, and aerospace, nanometer-level precision control and system stability have become the core factors that determine product yield and technological breakthroughs. Yokogawa's latest SR1015C02-2SN/97S1121 DD controller (Direct Drive Controller) has set a new standard for industrial precision control with its cutting-edge direct drive control technology and intelligent system architecture. This controller, which integrates high precision, high response, and high reliability, not only solves the problems of lag and loss in traditional servo control, but also promotes high-end manufacturing to move towards the "zero error" control era through deep technical integration.


Precision manufacturing upgrade is imminent, and traditional control technology encounters bottlenecks

As the semiconductor process breaks through the 3nm and below nodes, the LCD panel cutting accuracy is required to reach ±1μm, and the aircraft engine blade processing error needs to be controlled within 0.1μm. The traditional servo motor + reducer transmission control mode can no longer meet the needs. Problems such as positioning error caused by reducer gear clearance, precision attenuation caused by mechanical wear, and response delay caused by complex transmission chains are becoming increasingly prominent in high-end manufacturing scenarios. For example, when a semiconductor wafer inspection device uses a traditional servo system, the positioning error of the probe station reaches ±3μm due to the lag of the transmission chain, which directly affects the accuracy of nano-scale circuit detection; when a photovoltaic thin film deposition device is running at high speed, the dynamic response delay of the traditional control solution exceeds 50ms, causing the film thickness uniformity deviation to exceed 10%.
At the same time, new demands such as multi-axis collaborative control, flexible production, and intelligent equipment operation and maintenance have also posed higher challenges to the controller's computing power, communication efficiency, and system compatibility. The market urgently needs a next-generation controller that can achieve "direct drive control + intelligent algorithm + open architecture". Yokogawa Electric's SR1015C02-2SN/97S1121 DD controller has achieved technological breakthroughs in this context, subverting the traditional transmission mode with direct drive control, optimizing control logic with digital twins, and accommodating multiple scenarios with an open ecosystem.


Three major technological breakthroughs, reshaping the precision control technology system

Direct drive control architecture: a leap from "mechanical transmission" to "electromagnetic direct drive"
The SR1015C02-2SN/97S1121 DD controller adopts a direct drive control solution without a reducer. Through the integrated design of a high-torque density rare earth permanent magnet synchronous motor and a high-precision encoder, it achieves the industry's top performance of positioning accuracy of ±0.1μm and speed fluctuation of ±0.01%. Compared with traditional servo systems, the direct drive architecture eliminates gear backlash (traditional reducer backlash is usually 5-10arcmin) and reduces the transmission chain error by more than 90%. In an OLED panel evaporation equipment application, the evaporation mask positioning system driven by the controller has improved the deposition accuracy of organic materials from ±3μm to ±0.5μm, and the product yield from 82% to 95%.


Dual-core heterogeneous computing: nanosecond real-time control and edge intelligence integration

The controller is equipped with an ARM Cortex-A55+FPGA dual-core heterogeneous processor. The ARM core is responsible for complex algorithm operations and system management, and the FPGA implements nanosecond real-time control logic processing. This architecture enables the controller to simultaneously perform multi-axis interpolation operations (supporting up to 32 axes of collaboration), real-time status monitoring, predictive maintenance and other tasks, with a data processing speed of 2000MIPS, which is 4 times higher than the previous generation of products. After adopting this controller, the five-axis linkage processing efficiency of a certain aircraft engine blade processing center increased by 30%, and the processing time of complex curved surfaces was shortened from 4 hours to 2.5 hours. At the same time, the surface roughness Ra value was reduced from 1.6μm to 0.8μm.


Full-stack communication protocol: Building a seamless industrial 4.0 ecosystem

The controller supports 12 industrial communication protocols such as EtherCAT, PROFINET, and OPC UA. Through the built-in edge computing gateway, it can directly connect to the MES and ERP systems to achieve real-time upload and cloud analysis of production data. In the transformation of a semiconductor packaging and testing plant's smart workshop, the SR1015C02-2SN/97S1121 DD controller is seamlessly integrated with Yokogawa's CENTUM VP distributed control system, which increases the OEE (overall equipment efficiency) of packaging equipment from 68% to 89%, and the fault warning accuracy rate reaches 92%, predicting potential faults such as servo motor bearing wear 72 hours in advance.


Benchmark applications in multiple industries: from laboratory technology to industrialization

Semiconductor manufacturing: breaking through the limits of nano-level process control
In the application of ion implanters in a 12-inch wafer fab, the wafer stage positioning system driven by the SR1015C02-2SN/97S1121 DD controller achieved a repeatable positioning accuracy of ±0.1μm, meeting the stringent requirements of EUV lithography for wafer stage motion accuracy. The controller also dynamically corrects thermal deformation errors through a built-in temperature compensation algorithm (real-time sampling frequency 10kHz), so that the uniformity of ion implantation dose is controlled within ±1%, which is 50% higher than the traditional solution.

Photovoltaic thin film deposition: efficiency and reliability are both improved

After a TOPCon battery manufacturer used this controller to transform PECVD equipment, the uniformity of thin film deposition increased from ±5% to ±1.5%, and the hourly production capacity increased from 120 pieces to 160 pieces. The controller's built-in intelligent energy management system reduces the device's standby power consumption by 35%, saving about 120,000 kWh of electricity annually. More importantly, the direct-drive architecture eliminates the need for reducer maintenance, reducing the device's annual maintenance cost by 60% and unplanned downtime by 80%.
Medical device manufacturing: the "nerve center" of micro-nano operations
In the development of a minimally invasive interventional surgical robot, the SR1015C02-2SN/97S1121 DD controller provides sub-millimeter motion control accuracy for the robot arm, and its force feedback algorithm achieves a tactile perception resolution of 0.1N, enabling doctors to perform delicate operations such as vascular stent implantation through remote control. The controller's real-time data encryption function (supporting the AES-256 encryption algorithm) also meets the strict requirements of medical equipment for data security.


Technology leads the future: from precision control to industrial ecological reconstruction

The launch of Yokogawa's SR1015C02-2SN/97S1121 DD controller is not only a product upgrade, but also a reconstruction of the precision control technology system. Through open API interfaces and SDK development kits, the controller has attracted more than 50 upstream and downstream companies to join the ecological cooperation, covering sensors, actuators, industrial software and other fields. A relevant person in charge of Yokogawa Electric said: "We are building a full-chain precision manufacturing ecosystem of 'control + perception + decision-making'. In the future, we will use AI models and digital twin technology to achieve a leap from single-device control to full-line optimization."
With the development of technologies such as 5G, digital twins, and quantum computing, the SR1015C02-2SN/97S1121 DD controller will be further upgraded to an "intelligent control center", which not only has high-precision motion control capabilities, but also can continuously optimize control strategies through cloud AI models to achieve autonomous evolution of equipment performance. In the foreseeable future, this controller is expected to promote the transformation of high-end manufacturing from "manual debugging" to "autonomous optimization", provide core support for technological breakthroughs in strategic industries such as semiconductors, new energy, and aerospace, and help the global industry take a key step towards intelligence and precision.

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